Abstract: As the feature size of advanced integrated circuits keeps shrinking, resolution enhancement techniques (RETs) are utilized to improve the printability in the lithography process. Optical ...
Mask annotation comparison between Youtube-VIS and HQ-YTVIS. HQ-YTVIS serves as a new benchmark to facilitate future development (training & evaluation) of VIS methods aiming at higher mask quality.
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback